HummerI,II,III & JR. V,VI,VIA,VII, Miscellaneous Parts

Part # Description Price
1001039 Magnet $164.00
1002020 Target Extractor $23.00
1004009 Hi-Voltage Transformer $319.00
1004016 Bridge Rectifier $264.00
1004023 Milli-Amp Meter $295.00
1004044 Power Cord $76.00
1004049 Thermocouple DV23(Analog Meter) $264.00
1004055 Pressure Switch $240.00
1004066 Amperite 115C15B Delay Relay $139.10
1004085 Guage Tube ( Digital Meter ) $234.00
1005005 Vacuum Seal Grease $68.00
1007053 Banana Plug Assembly $59.00
1007085
  • O-Ring and Gasket Kit
  • 2-1007097 Chamber Gasket Set
  • 2-1008009 O-Ring Anode Assembly
  • 3-1008013 O-Ring, Target
  • 3-1008013 O-Ring, TargetAssembly
  • 1-1008017 O-Ring, Feed Through
$184.00
1007096 Kel-F Electrode Plug-In Kit
  • 3-1002017 Banana Plug
  • 1-1002020 Target Extractor
  • 1-1002065 Large Insulator
  • 2-1002066 Small Insulator
  • 3-1002067 HV Connector
  • 3-1008013 )-Ring, HV Insulator
  • 1-1101024 Kepnut 4-40
  • 1-1101028 Nut 4-40
$351.20
1007097 Chamber Gasket Kit-Viton $84.00
1008003 Fine Metering Valve $454.00
1008010 Feed Through, Anode $74.00
1008019 Vacuum Pump Oil (1 Litre) $67.00
1405001 Deposition Chamber $204.00
1407001 O-Ring and Gasket Kit (Straight)
  • 4-1305002 Boot Gasket
  • 2-1008009 0-Ring, Anode Assembly
  • 3-1008013 O-Ring, Target Insulator
  • 1-1008017 O-Ring, Feed Through
$113.60
1407002
  • O-Ring and Gasket Kit (Flared)
  • 4-1305002 Boot Gasket
  • 2-1008009 0-Ring, Anode Assembly
  • 3-1008013 O-Ring, Target Insulator
  • 1-1008017 O-Ring, Feed Through
$86.00
1407003 Flat Gasket Set $40.40
1407021 Boot Gasket Set (Straight Chamber) $112.00
1408001 Vent Flip Valve $167.00
2801007 Magnet $109.00
2805002 Deposition Chamber T.B.A.

Hummer VI Miscellaneous Parts

Part # Description Price
1005003 Deposition Chamber 3.7" $161.90
1005009 Deposition Chamber 6" $180.00
1007013 Hummer VI Operations Manual $129.30

Hummer VIA Miscellaneous Parts

Part # Description Price
N/A Hummer VIA Operation Manual -

Hummer VII Miscellaneous Parts

Part # Description Price
N/A Hummer VIA Operation Manual -
1904060 Solenoid Gas Valve $129.00
1904061 Solenoid Vent Valve T.B.A.

Hummer I,II,III & Junior Miscellaneous Parts

Part # Description Price
1507002
  • O-Ring and Gasket Kit
  • 1-1008009 O-Ring, Anode Assembly
  • 1-1008017 O-Ring, Feed Through
  • 1-1407003 Flat Gasket Set (Flared Chamber)
  • 1-1508001 O-Ring Feed Through
  • 1-1508002 O-Ring Insulator
T.B.A.
1507006
  • Fine Metering Valve Kit
  • 1-1008003 Fine Metering Valve
  • 2-1008007 Connector
$357.00
1507022
  • O-Ring and Gasket Kit
  • 1-1008009 O-Ring, Anode Assembly
  • 1-1008017 O-Ring, Feed Through
  • 1-1407003 Boot Gasket Set (Straight Chamber)
  • 1-1508001 O-Ring Feed Through
  • 1-1508002 O-Ring Insulator
$112.00

Hummer XP Miscellaneous Parts

Part # Description Price
1001081 Feed Through Anode $59.00
1008006 Solenoid Vent Valve $248.70
1008019 Vacuum Pump Oil $67.00
1104125 Solenoid Gas Valve 12V $136.00
1107018 DTM Holder Assembly $180.00
1107054 Display PCB $1,787.00
1107059 HV Cable $83.00
1107105 Banana Plug Kit HU X, XP $103.00
1901004 Standoff, Ceramic $18.30
2005001-10" Deposition Chamber $479.00
2005001-12" Deposition Chamber $549.00
2005001-16" Deposition Chamber $637.00
2005001-8" Deposition Chamber $438.00
2007025 Top Plate Cable with Ground Wire $127.40
2007065 Chamber Gasket Set, Viton $114.00
2007066
  • O-Ring and Gasket Kit, Viton
  • 3-1008009 O-Ring, Anode
  • 1-1008017 O-Ring, Feed Through
  • 1-1901004 Spacer, Ceramic
  • 3-2001002 Screw, Hex Set
  • 1-2005002 O-Ring, HV
  • 4-2008003 Gasket, Viton
  • 2008003-SET Gasket SET Viton 2 ($108.00)
$314.00
N/A Hummer XP Manual -

Hummer 6.6 - Standard Targets - 4"

Part # Description Price
1902014 Gold/Palladium Target $1 750.00
1902016 Gold Target .004 Thick $1 925.00
1902062 Gold Target .010 Thick $2 400.00
1902046 Aluminum Etch Target $195.00

Hummer 6.6 - Non Standard Targets

Part # Description Price
1902022 Silver Target .004 Thick $850.00
1902018 Platinum Target $2 040.00
1902020 Palladium Target $2 040.00

Hummer 6.6 - Miscellaneous Parts

Part # Description Price
1002020 Target Extractor $23.00
1004016 Bridge Rectifier $264.00
1004085 Gauge Tube (Use w/1104178) $170.00
1008003 Fine Metering Valve $350.00
1008010 Feedthru Anode $40.00
1008051-24 VDC VALVE SOLENOID (Formerly 1008006) $110.00
1008019 Vacuum Pump Oil $30.00
1008019 Fuse 2 AMP AGC2 740-0115 $2.00
2004001 Transformer TM-5225 $355.00

Hummer 6.6 - Miscellaneous Parts

Part # Description Price
2005001-8" Deposition Chamber (8.465" OD X 7.756 ID X 8" LG) $438.00
2005001-10" Deposition Chamber (8.465" OD X 7.756 ID X 10" LG) $479.00
2005001-12" Deposition Chamber (8.465" OD X 7.756 ID X 12" LG) $549.00
2005001-16" Deposition Chamber (8.465" OD X 7.756 ID X 16" LG) $637.00
1001030 BEZEL W/MTG 3125 2BA2 $61.00
1007053 Banana Plug Kit $40.00
1004023 METER 0-50 ACM D-1185817R $295.00
1008057 VRC Gauge Display, 902001 1 to 2000 (mTorr with Dual Set Point controller digital) $1 165.00
1005047-ALC Filter exhaust OME 2002 AL P/N 062886 $320.00
N/A Hummer 6.6 Manual $80.00
1008009 O-Ring Anode 2-012 BUNA (5) $17.00
1008013 O-Ring HV Insulator 2-109 BUNA (5) $17.00
1008051-110 VDC VALVE SOLENOID $203.00
2008003-SET Chamber Gasket Set Viton - 2 EA. $108.00
2007066-6.6 O-Ring & Gasket Set, Viton
  • 1 - 1008009 O-Ring, Anode
  • 1 - 1008013 O-Ring, Feedthru
  • 2 - 2008003 Gasket, Viton - Chamber
  • 1 - 2908008 O-Ring, Viton - Motor to Base PL
  • 1 - 3808001 O-Ring, Viton - Stage to Motor
$314.00
3005000-ALC Fuse 2 AMP AGC2 740-0115
  • UM2002BSL 2002
  • Standard Series 3.10-3mbar Oil A119
$3 335.00

Hummer 6.6 - Miscellaneous Parts

Part # Description Price
4004031 Timer (110V AC) CNT-35-76 (CR4004056) $295.00
4004049 FUSE 10 AMP (CR 1904066) - 740-0201 $9.00
4105010 Valve Solenoid (3121BBN1GN00N00N0M1S193) $155.00
2908008 O-Ring 2-010 Viton $8.00
2008001 Gasket #8 Boot Buna $66.00
3808001 O-Ring 2-024 Viton $9.00

All prices are in Canadian Dollars. To request a price quotation or for other inquiries, please contact us.